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PMP: Volatile Particle Remover calibration issues
Document PMP-30-04
3 April 2014
Submitted by JRC
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Previous Documents, Discussions, and Outcomes
4. | Calibration status

The VPR calibration report is currently unchanged – the recommendations from JRC were added to the report as comments .

The CPC calibration document is also unchanged.

Both documents to be uploaded to PMP website with request for comments.

Agreed – only to consider updates in relation to 23nm at the present time. A further update to 10nm would be made when more information is available.

Next meeting – BERN GPF presentation

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