Document Number PMP-30-12
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Document title PMP draft recommendations for <23nm measurements
Date 4 Apr 2014
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Rulemaking area(s)
Meeting(s)
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PMP | Session 30 | 3-4 Apr 2014

The VPR calibration report is currently unchanged – the recommendations from JRC were added to the report as comments .

The CPC calibration document is also unchanged.

Both documents to be uploaded to PMP website with request for comments.

Agreed – only to consider updates in relation to 23nm at the present time. A further update to 10nm would be made when more information is available.

Next meeting – BERN GPF presentation