PMP-30-10
Volatile Particle Remover Calibration and Validation Procedures
Downloads
UNECE server
Related documents
Excerpts from session reports
PMP | Session 30 | 3-4
Apr 2014
The VPR calibration report is currently unchanged – the recommendations from JRC were added to the report as comments .
The CPC calibration document is also unchanged.
Both documents to be uploaded to PMP website with request for comments.
Agreed – only to consider updates in relation to 23nm at the present time. A further update to 10nm would be made when more information is available.
Next meeting – BERN GPF presentation