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Volatile Particle Remover Calibration and Validation Procedures
Document PMP-30-10
3 April 2014

This document describes the calibration and validation procedures for the VPR. Calibration of the VPR is to be performed at the point of manufacture and validation is to be performed at least at 6 month intervals for all instruments without automatic temperature sensors or at least at 12 month intervals if automatic temperature sensors are present. The calibration procedure must be repeated if the system ‘fails’ its validation procedure or the particle number measurement system is modified in any way.

Submitted by AEA
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Previous Documents, Discussions, and Outcomes
4. | Calibration status

The VPR calibration report is currently unchanged – the recommendations from JRC were added to the report as comments .

The CPC calibration document is also unchanged.

Both documents to be uploaded to PMP website with request for comments.

Agreed – only to consider updates in relation to 23nm at the present time. A further update to 10nm would be made when more information is available.

Next meeting – BERN GPF presentation

Relates to PMP |